1. Borid Püskürtme Hedefi
CrB, FeB, HfB2, LaB6, MgB2, Mo2B5 ,NbB, SmB6, TaB, TiB2, WB, VB, VB2, ZrB2
2. Karbür Püskürtme Hedefi
B4C, Cr3C2, HfC, Mo2C, NbC, SiC, TaC, TiC, TiCN, VC, WC, VC, ZrC
3. Florür Püskürtme Hedefi
BaF2, CaF2, CeF3, FeF2, KF, LaF3, PbF2, MgF2, NaF
4. Nitrür Püskürtme Hedefi
AlN, BN, CrN, GaN, HfN, InN, NbN, NbCrN, Si3N4, TaN, TiN, VN, ZnN, ZrN, ZrCN
5. Oksit Püskürtme Hedefi
Al2O3, ATO, AZO, BaTiO3, BSCCO, BST, CeO2, CuO, Cr2O3,Fe2O3, HfO2, In2O3, ITO, IZO, IZGO, IZTO, LaAl2O3, LaSrMnO3, LiNbO3, MgO, Pb2T, PİO3, PİO3, Nib2T, Sb2O3, SiO, SiO2, SnO2, SrRuO3, SrTiO3, Ta2O5, TiO2, SnO2, V2O5, WO3, Y2O3, Yb2O3, YBCO, YSZ, ZnO, ZAO, ZGO, ZIO, ZTO
6. Selenid Püskürtme Hedefi
Al2Se3, Bi2Se3, CdSe, CuSe, Cu2Se, FeSe2, GeSe, In2Se3, MoSe2, MnSe, NbSe2, PbSe, Sb2Se3, SnSe, TaSe2, WSe2, ZnSe
7. Silisit Püskürtme Hedefi
CoSi2, CrSi2, FeSi2, HfSi2, MoSi2, NbSi2, NiSi2, TaSi2, TiSi2, WSi2, VSi2, ZrSi2
8. Sülfür Püskürtme Hedefi
CdS, CuS, Cu2S, FeS2, GaS, GeS, In2S3, PbS, MoS2, NiS, TiS2, Sb2S3, SnS, WS2, ZnS
9. Telluride Püskürtme Hedefi
Al2Te3, Bi2Te3, CdTe, CuTe, GaTe, Ga2Te3, GeTe, PbTe, MnTe, MoTe2, NbTe2, TaTe2, SbTe, SnTe, WTe2, ZnTe
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